Fabrication of plasmonic crystals using programmable nanoreplica molding process

Longju Liu; Mohsin A. Badshah; Seok-min Kim; Meng Lu

doi:10.1117/12.2212053

14 March 2016 Fabrication of plasmonic crystals using programmable nanoreplica molding process

Longju Liu, Mohsin A. Badshah, Seok-min Kim, Meng Lu

Proceedings Volume 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX; 97591G (2016) https://doi.org/10.1117/12.2212053
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

The development of many photonic devices, such as photonic integrated circuit, optical sensors, and photovoltaic devices, demands low-cost and reliable fabrication technologies to fabricate sub-wavelength features. Here, we report a programmable nanoreplica molding process, which is capable of producing photonic devices with a variety of submicrometer patterns. The process utilizes a stretchable plastic mold to generate the desired periodic pattern using a UVcurable polymer on plastic substrates. During the replica molding process, a uniaxial force is applied to the mold and results in changes of the periodic structure, which locates on the surface of the mold. The geometry of the replicated pattern, including the lattice constant and arrangement, is determined by the magnitude and direction of the force. As an example, we present a plasmonic crystal device with surface plasmon resonances carefully tuned by using the uniaxial force. This unique process offers an inexpensive route to generate various periodic nanostructures rapidly.

Citation Download Citation

Longju Liu, Mohsin A. Badshah, Seok-min Kim, and Meng Lu "Fabrication of plasmonic crystals using programmable nanoreplica molding process ", Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97591G (14 March 2016); https://doi.org/10.1117/12.2212053

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available