A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy

Song Xu; Chih-Hsien Huang; Jun Zou

doi:10.1117/12.2211746

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15 March 2016 A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy

Song Xu, Chih-Hsien Huang, Jun Zou

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Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 976002 (2016) https://doi.org/10.1117/12.2211746
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.

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Song Xu, Chih-Hsien Huang, and Jun Zou "A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 976002 (15 March 2016); https://doi.org/10.1117/12.2211746

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