MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies

Jan Grahmann; André Dreyhaupt; Christian Drabe; Richard Schrödter; Jörg Kamenz; Thilo Sandner

doi:10.1117/12.2212965

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15 March 2016 MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies

Jan Grahmann, André Dreyhaupt, Christian Drabe, Richard Schrödter, Jörg Kamenz, Thilo Sandner

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Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 976006 (2016) https://doi.org/10.1117/12.2212965
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Two new technological process flows for the piezoresistive position detection of resonant and quasistatic micro scanning mirrors were developed to increase sensitivities by a factor of 3:6 compared to former sensors, improve signal to noise ratio of the sensor signal and to allow controlled feedback loop operation. The sensor types use differently doped and deposited silicon. One is based on single crystal silicon with a pn-junction to isolate the active sensor area from the device layer silicon, the other one is based on a deposited and structured polysilicon. The sensor characteristics are compared including light, temperature dependence and reliability results.

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Jan Grahmann, André Dreyhaupt, Christian Drabe, Richard Schrödter, Jörg Kamenz, and Thilo Sandner "MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 976006 (15 March 2016); https://doi.org/10.1117/12.2212965

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