Translator Disclaimer
15 March 2016 Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review
Author Affiliations +
Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600H (2016)
Event: SPIE OPTO, 2016, San Francisco, California, United States
Many application fields of infrared spectroscopy require small, robust and transportable spectrometers, which are considerable less costly than existing products. Therefore microspectrometer technologies are rapidly emerging and many research groups spend effort on this. Compared to other kinds of devices, micromachined tunable Fabry-Pérot filters are best suited in terms of miniaturization and optical throughput. This paper gives a review of μFP filters for infrared spectroscopy. Different approaches from several groups are compared. Optical performance parameters like wavelength tuning range, spectral resolution and aperture size as well as complexity of fabrication and costs are discussed.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Martin Ebermann, Norbert Neumann, Karla Hiller, Mario Seifert, Marco Meinig, and Steffen Kurth "Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600H (15 March 2016);

Back to Top