Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review

Martin Ebermann; Norbert Neumann; Karla Hiller; Mario Seifert; Marco Meinig; Steffen Kurth

doi:10.1117/12.2209288

15 March 2016 Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review

Martin Ebermann, Norbert Neumann, Karla Hiller, Mario Seifert, Marco Meinig, Steffen Kurth

Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600H (2016) https://doi.org/10.1117/12.2209288
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Many application fields of infrared spectroscopy require small, robust and transportable spectrometers, which are considerable less costly than existing products. Therefore microspectrometer technologies are rapidly emerging and many research groups spend effort on this. Compared to other kinds of devices, micromachined tunable Fabry-Pérot filters are best suited in terms of miniaturization and optical throughput. This paper gives a review of μFP filters for infrared spectroscopy. Different approaches from several groups are compared. Optical performance parameters like wavelength tuning range, spectral resolution and aperture size as well as complexity of fabrication and costs are discussed.

Citation Download Citation

Martin Ebermann, Norbert Neumann, Karla Hiller, Mario Seifert, Marco Meinig, and Steffen Kurth "Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600H (15 March 2016); https://doi.org/10.1117/12.2209288

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