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15 March 2016 Novel Fourier transform infrared spectrometer architecture based on cascaded Fabry-Perot interferometers
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Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600L (2016)
Event: SPIE OPTO, 2016, San Francisco, California, United States
In this work, we present a novel architecture for Fourier transform spectrometers based on cascaded low-finesse FP interferometers. One of the interferometers has fixed path length while the second is a scanning one using a relatively large stroke electrostatic comb-drive actuator. The fixed interferometer results in a spectrum modulation and, hence, a shifted version of the interferogram away from the point of the zero spacing between the two mirrors. The shifted interferogram can then be used with the Fourier transform algorithm to obtain the spectrum of the measured light. This cascaded FP configuration results in a simple arrangement of mirrors on a line, which makes it much tolerant to misalignment errors. The proposed configuration is implemented using the MEMS DRIE technology on an SOI wafer with a simple MEMS process flow without metallization or dielectric coating of the vertical optical surface. The fabricated compact structure is measured with both a laser source with narrow spectrum at 1550 nm and a wide spectrum source composed of an SLED and the ASE of a semiconductor optical amplifier source. The obtained results validate the concept of the new configuration.
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Yomna M. Eltagoury, Yasser M. Sabry, and Diaa A. Khalil "Novel Fourier transform infrared spectrometer architecture based on cascaded Fabry-Perot interferometers", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600L (15 March 2016);


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