VCSELs for interferometric readout of MEMS sensors

Darwin K. Serkland; Kent M. Geib; Gregory M. Peake; Gordon A. Keeler; Michael J. Shaw; Michael S. Baker; Murat Okandan

doi:10.1117/12.2214522

18 March 2016 VCSELs for interferometric readout of MEMS sensors

Darwin K. Serkland, Kent M. Geib, Gregory M. Peake, Gordon A. Keeler, Michael J. Shaw, Michael S. Baker, Murat Okandan

Proceedings Volume 9766, Vertical-Cavity Surface-Emitting Lasers XX; 976606 (2016) https://doi.org/10.1117/12.2214522
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We report on the development of single-frequency VCSELs (vertical-cavity surface-emitting lasers) for sensing the position of a moving MEMS (micro-electro-mechanical system) object with resolution much less than 1nm. Position measurement is the basis of many different types of MEMS sensors, including accelerometers, gyroscopes, and pressure sensors. Typically, by switching from a traditional capacitive electronic readout to an interferometric optical readout, the resolution can be improved by an order of magnitude with a corresponding improvement in MEMS sensor performance. Because the VCSEL wavelength determines the scale of the position measurement, laser wavelength (frequency) stability is desirable. This paper discusses the impact of VCSEL amplitude and frequency noise on the position measurement.

Citation Download Citation

Darwin K. Serkland, Kent M. Geib, Gregory M. Peake, Gordon A. Keeler, Michael J. Shaw, Michael S. Baker, and Murat Okandan "VCSELs for interferometric readout of MEMS sensors", Proc. SPIE 9766, Vertical-Cavity Surface-Emitting Lasers XX, 976606 (18 March 2016); https://doi.org/10.1117/12.2214522

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