Advances in the detection capability on actinic blank inspection

Takeshi Yamane; Tsuyoshi Amano; Noriaki Takagi; Hidehiro Watanabe; Ichro Mori; Tomohisa Ino; Tomohiro Suzuki; Kiwamu Takehisa; Hiroki Miyai; Haruhiko Kusunose

doi:10.1117/12.2222747

18 March 2016 Advances in the detection capability on actinic blank inspection

Takeshi Yamane, Tsuyoshi Amano, Noriaki Takagi, Hidehiro Watanabe, Ichro Mori, Tomohisa Ino, Tomohiro Suzuki, Kiwamu Takehisa, Hiroki Miyai, Haruhiko Kusunose

Author Affiliations +

Proceedings Volume 9776, Extreme Ultraviolet (EUV) Lithography VII; 97761G (2016) https://doi.org/10.1117/12.2222747
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

Improvements in the detection capability of a high-volume-manufacturing (HVM) actinic blank inspection (ABI) prototype for native defects caused by illumination numerical aperture (NA) enlargement were evaluated. A mask blank was inspected by varying the illumination NA. The defect signal intensity increased with illumination NA enlargement as predicted from simulation. The mask blank was also inspected with optical tools, and no additional phase defect was detected. All of the printable phase defects were verified to have been detected by the HVM ABI prototype.

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Takeshi Yamane, Tsuyoshi Amano, Noriaki Takagi, Hidehiro Watanabe, Ichro Mori, Tomohisa Ino, Tomohiro Suzuki, Kiwamu Takehisa, Hiroki Miyai, and Haruhiko Kusunose "Advances in the detection capability on actinic blank inspection", Proc. SPIE 9776, Extreme Ultraviolet (EUV) Lithography VII, 97761G (18 March 2016); https://doi.org/10.1117/12.2222747

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