Method for fast computation of angular light scattering spectra from 2D periodic arrays

Jan Pomplun; Sven Burger; Lin Zschiedrich; Philipp Gutsche; Frank Schmidt

doi:10.1117/12.2219666

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8 March 2016 Method for fast computation of angular light scattering spectra from 2D periodic arrays

Jan Pomplun, Sven Burger, Lin Zschiedrich, Philipp Gutsche, Frank Schmidt

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Proceedings Volume 9778, Metrology, Inspection, and Process Control for Microlithography XXX; 977839 (2016) https://doi.org/10.1117/12.2219666
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

An efficient numerical method for computing angle-resolved light scattering off periodic arrays is presented. The method combines finite-element discretization with a Schur complement solver. A significant speed-up of the computations in comparison to standard finite-element method computations is observed.

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Jan Pomplun, Sven Burger, Lin Zschiedrich, Philipp Gutsche, and Frank Schmidt "Method for fast computation of angular light scattering spectra from 2D periodic arrays", Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX, 977839 (8 March 2016); https://doi.org/10.1117/12.2219666

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