Metal containing material processing on coater/developer system

Shinichiro Kawakami; Hiroshi Mizunoura; Koichi Matsunaga; Koichi Hontake; Hiroshi Nakamura; Satoru Shimura; Masashi Enomoto

doi:10.1117/12.2219106

25 March 2016 Metal containing material processing on coater/developer system

Shinichiro Kawakami, Hiroshi Mizunoura, Koichi Matsunaga, Koichi Hontake, Hiroshi Nakamura, Satoru Shimura, Masashi Enomoto

Author Affiliations +

Proceedings Volume 9779, Advances in Patterning Materials and Processes XXXIII; 97790H (2016) https://doi.org/10.1117/12.2219106
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

Challenges of processing metal containing materials need to be addressed in order apply this technology to Behavior of metal containing materials on coater/developer processing including coating process, developer process and tool metal contamination is studied using CLEAN TRACK^TM LITHIUS Pro^TM Z (Tokyo Electron Limited). Through this work, coating uniformity and coating film defectivity were studied. Metal containing material performance was comparable to conventional materials. Especially, new dispense system (NDS) demonstrated up to 80% reduction in coating defect for metal containing materials. As for processed wafer metal contamination, coated wafer metal contamination achieved less than 1.0E10 atoms/cm² with 3 materials. After develop metal contamination also achieved less than 1.0E10 atoms/cm² with 2 materials. Furthermore, through the metal defect study, metal residues and metal contamination were reduced by developer rinse optimization.

Citation Download Citation

Shinichiro Kawakami, Hiroshi Mizunoura, Koichi Matsunaga, Koichi Hontake, Hiroshi Nakamura, Satoru Shimura, and Masashi Enomoto "Metal containing material processing on coater/developer system", Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 97790H (25 March 2016); https://doi.org/10.1117/12.2219106

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