Paper
20 May 2016 On the figure of merit of uncooled bolometers fabricated at INO
Francis Généreux, Bruno Tremblay, Marc Girard, Jacques-Edmond Paultre, Francis Provençal, Yan Desroches, Hassane Oulachgar, Samir Ilias, Christine Alain
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Abstract
This paper reports the NETD values of various uncooled bolometers fabricated at INO. They are measured using an external readout circuit that emulates the readout scheme of a commercial ROIC. The measured NETD values range between 6 and 75 mK, depending on the pixel pitch and response time. Pixel pitches of 12, 17 and 35 μm are considered. The figure of merit of the characterized detectors is below 350 mK*ms.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Francis Généreux, Bruno Tremblay, Marc Girard, Jacques-Edmond Paultre, Francis Provençal, Yan Desroches, Hassane Oulachgar, Samir Ilias, and Christine Alain "On the figure of merit of uncooled bolometers fabricated at INO", Proc. SPIE 9819, Infrared Technology and Applications XLII, 98191U (20 May 2016); https://doi.org/10.1117/12.2228863
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Cited by 3 scholarly publications and 1 patent.
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KEYWORDS
Bolometers

Bolometers

Microbolometers

Gold

Camera shutters

Indium oxide

Sensors

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