Layered synthetic multilayers for high resolution X-ray reflection in the 6 to 8 keV region.

E J. Puik; M J van der Wiel; J. Verhoeven

doi:10.1117/12.948777

16 December 1988 Layered synthetic multilayers for high resolution X-ray reflection in the 6 to 8 keV region.

E J. Puik, M J van der Wiel, J. Verhoeven

Proceedings Volume 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers; (1988) https://doi.org/10.1117/12.948777
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

In this paper results are presented of the deposition and characterization of Ni - C and NiSi - C multilayer coatings consisting of a large number of layers (typically 475; d = 22.3 Å) containing ultra thin metal layers (4 Å). During deposition, information about changes in the roughness of the top interface is obtained using an in situ X-ray reflectometer. Afterwards the coatings have been characterized using CuKα diffraction; the resolutions and relative reflectivities have been determined. The influence of the presence of a hydrogen atmosphere during deposition and the effect of mixing Si with Ni have been studied. Finally we report on a Ni - C multilayer coating consisting of 815 layers, having a resolution λ/Δλ of 275.

Citation Download Citation

E J. Puik, M J van der Wiel, and J. Verhoeven "Layered synthetic multilayers for high resolution X-ray reflection in the 6 to 8 keV region.", Proc. SPIE 0984, X-Ray Multilayers in Diffractometers, Monochromators, and Spectrometers, (16 December 1988); https://doi.org/10.1117/12.948777

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