Paper
26 May 2016 Novel high performance multispectral photodetector and its performance
Genki Mizuno, Jaydeep Dutta, Patrick Oduor, Achyut K. Dutta, Nibir K. Dhar
Author Affiliations +
Abstract
Banpil Photonics has developed a novel high-performance multispectral photodetector array for Short-Wave Infrared (SWIR) imaging. The InGaAs based device uses a unique micro-nano pillar structure that eliminates surface reflection to significantly increase sensitivity and the absorption spectra compared to its macro-scaled thin film pixels counterpart (non-pillar). We discuss the device structure and highlight fabrication of the novel high performance multispectral image sensor. We also present performance results of the device characterization showing low dark current suitable for high performance imaging applications for the most demanding security, defense, and machine vision applications.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Genki Mizuno, Jaydeep Dutta, Patrick Oduor, Achyut K. Dutta, and Nibir K. Dhar "Novel high performance multispectral photodetector and its performance", Proc. SPIE 9854, Image Sensing Technologies: Materials, Devices, Systems, and Applications III, 985410 (26 May 2016); https://doi.org/10.1117/12.2230574
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Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Absorption

Etching

Photodetectors

Image sensors

Quantum efficiency

Short wave infrared radiation

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