A highly miniaturized NDIR methane sensor

N. Pelin Ayerden; Ger de Graaf; Peter Enoksson; Reinoud F. Wolffenbuttel

doi:10.1117/12.2225924

27 April 2016 A highly miniaturized NDIR methane sensor

N. Pelin Ayerden, Ger de Graaf, Peter Enoksson, Reinoud F. Wolffenbuttel

Proceedings Volume 9888, Micro-Optics 2016; 98880D (2016) https://doi.org/10.1117/12.2225924
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

The increasing demand for handheld systems for absorption spectroscopy has triggered the development of microspectrometers at various wavelength ranges. Several MEMS implementations of the light source, interferometer/optical filter, and detector have already been reported in the literature. However, the size of microspectrometers is still limited by the required absorption path length in the sample gas cell. This paper presents a compact MEMS linear-variable optical filter (LVOF) where the resonator cavity of the filter is also used as a sample gas cell to measure the absorption of methane at 3392nm wavelength. The physical resonator cavity length is elongated 62.2-fold, using multiple reflections from highly reflective Bragg mirrors to achieve a sufficiently long effective optical absorption path. Although the LVOF would in principle enable operation as a robust portable microspectrometer, here it is used in a miniaturized NDIR methane sensor for wavelength selection and calibration.

Citation Download Citation

N. Pelin Ayerden, Ger de Graaf, Peter Enoksson, and Reinoud F. Wolffenbuttel "A highly miniaturized NDIR methane sensor", Proc. SPIE 9888, Micro-Optics 2016, 98880D (27 April 2016); https://doi.org/10.1117/12.2225924

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