Several novel coating recipes have been developed with ion-assisted electron beam deposition (IAEBD) of various fluorides, oxides, and nitrides in combination with conformal layers of aluminum oxide (AlOx) deposited by ALD using trimethylaluminum as a metal precursor and water vapor as a reactant. Extending on our previous results demonstrating the superior durability of ALD-based AlOx top barrier layers over conventionally-deposited AlOx, this work investigates the effects on mirror barrier durability comparing different anti-oxidation materials on Ag with an identical AlOx top barrier layer deposited by ALD. Samples of coating recipes with different anti-oxidation layers undergo aggressive environmental testing, including high temperature/high humidity (HTHH), in which samples are exposed to an environment of 80% humidity at 80°C for ten days in a simple test set-up. While most samples show fairly successful endurance after HTHH testing, visible results suggest that MgAl2O4, Al2O3, and AlN anti-oxidation layers offer enhanced robust protection against chemical corrosion and moisture in an accelerated aging environment, which is attributed to superior adhesion and intermolecular bonding between the Al-based anti-oxidation layers and the AlOx top barrier layer. Mirror samples are further characterized by reflectivity/absorption before and after deposition of oxide coatings. We also show that the performance of the ALD-AlOx barrier layer depends in part on the temperature of that process.
You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.