A 3D translation stage calibrated with Michelson interferometers

Hui-Hung Lin; Kuo-Kai Hung; Lu-Yu Wang; Wei-Hung Su

doi:10.1117/12.2240068

7 September 2016 A 3D translation stage calibrated with Michelson interferometers

Hui-Hung Lin, Kuo-Kai Hung, Lu-Yu Wang, Wei-Hung Su

Proceedings Volume 9958, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X; 99581A (2016) https://doi.org/10.1117/12.2240068
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

A 3D translation stage which meets the requirement of the next-generation lithography is proposed. The Michelson interferometer is used to evaluate the moving distance for this 3-dimensional translation stage. With the help of Michelson interferometer, accuracy in the order of nanometers is desirable.

Citation Download Citation

Hui-Hung Lin, Kuo-Kai Hung, Lu-Yu Wang, and Wei-Hung Su "A 3D translation stage calibrated with Michelson interferometers", Proc. SPIE 9958, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X, 99581A (7 September 2016); https://doi.org/10.1117/12.2240068

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