Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter

Achyut Adhikari; Kapil Dev; Anand Asundi

doi:10.1117/12.2240639

28 August 2016 Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter

Achyut Adhikari, Kapil Dev, Anand Asundi

Author Affiliations +

Proceedings Volume 9960, Interferometry XVIII; 99600F (2016) https://doi.org/10.1117/12.2240639
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller Matrix of the WGP using a Mueller Matrix Polarimeter. Next the Finite Difference Time Domain (FDTD) method is used to simulate a similar Mueller matrix thus providing the period and step height of the WGP. This approach may lead to more generic determination of sub-wavelength structures including diffractive optical structures.

Conference Presentation

Citation Download Citation

Achyut Adhikari, Kapil Dev, and Anand Asundi "Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter", Proc. SPIE 9960, Interferometry XVIII, 99600F (28 August 2016); https://doi.org/10.1117/12.2240639

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