Automatic beam optimization technique based on beam profile deconvolution for scanning electron microscopy

Yunje Cho; Subong Shon; Yeny Yim; Changhoon Choi; Myungjun Lee

doi:10.1117/12.2612446

13 June 2022 Automatic beam optimization technique based on beam profile deconvolution for scanning electron microscopy

Yunje Cho, Subong Shon, Yeny Yim, Changhoon Choi, Myungjun Lee

Proceedings Volume PC12053, Metrology, Inspection, and Process Control XXXVI; PC120530B (2022) https://doi.org/10.1117/12.2612446
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

We present a novel method that can automatically correct astigmatism and focus error with great accuracy in the scanning electron microscopy (SEM). Here, an iterative deconvolution method and the feature-based compensation algorithm were applied to the beam control sequence, enabling us to obtain the clear SEM image without any distortion. A proof of concept was fully verified by both mathematical analysis and experimental results. By utilizing the proposed method, accurate beam profile optimization is possible without malfunction even when imaging a sample with anisotropic pattern.

Conference Presentation

Citation Download Citation

Yunje Cho, Subong Shon, Yeny Yim, Changhoon Choi, and Myungjun Lee "Automatic beam optimization technique based on beam profile deconvolution for scanning electron microscopy", Proc. SPIE PC12053, Metrology, Inspection, and Process Control XXXVI, PC120530B (13 June 2022); https://doi.org/10.1117/12.2612446

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