EUV lithography using colloidal nanoparticles

Saurav Mohanty; Kun-Chieh Chien; Vijay A. Premnath; Chih-Hao Chang

doi:10.1117/12.2641139

31 October 2022 EUV lithography using colloidal nanoparticles

Saurav Mohanty, Kun-Chieh Chien, Vijay A. Premnath, Chih-Hao Chang

Proceedings Volume PC12292, International Conference on Extreme Ultraviolet Lithography 2022; PC122920T (2022) https://doi.org/10.1117/12.2641139
Event: SPIE Photomask Technology + EUV Lithography, 2022, Monterey, California, United States

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Saurav Mohanty, Kun-Chieh Chien, Vijay A. Premnath, and Chih-Hao Chang "EUV lithography using colloidal nanoparticles", Proc. SPIE PC12292, International Conference on Extreme Ultraviolet Lithography 2022, PC122920T (31 October 2022); https://doi.org/10.1117/12.2641139

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