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17 March 2023 A 7×7-foci 3D laser nanoprinter using a diffractive optical element and an aspheric-lens array made by 3D laser nanoprinting
Pascal Kiefer, Vincent Hahn, Martin Wegener
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Proceedings Volume PC12412, Laser 3D Manufacturing X; PC1241205 (2023) https://doi.org/10.1117/12.2644949
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
Rapid multi-focus multi-photon laser printing suffers from insufficient photoresist sensitivity and limited focus quality. To overcome these problems and enable even higher printing rates, we present a novel approach for low-aberration and large field-of-view multi-focus printing with 7×7=49 foci at high focus scanning speeds. This is achieved by a combination of two 3D laser nanoprinted micro-optical elements: A low diffraction-order diffractive beam splitter to circumvent chromatic aberrations and an aspheric-lens array. The latter separates the diffracted beams to get a sufficient focus spacing. Together with highly sensitive photoresists we then allow for nanostructured sample dimensions inaccessible before.
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Pascal Kiefer, Vincent Hahn, and Martin Wegener "A 7×7-foci 3D laser nanoprinter using a diffractive optical element and an aspheric-lens array made by 3D laser nanoprinting", Proc. SPIE PC12412, Laser 3D Manufacturing X, PC1241205 (17 March 2023); https://doi.org/10.1117/12.2644949
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KEYWORDS
Printing
Diffractive optical elements
Photoresist materials
Glasses
Laser optics
Manufacturing
Materials science
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