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5 October 2023 Piezoelectric MEMS-empowered dynamic metasurfaces
Fei Ding
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Proceedings Volume PC12648, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXI; PC126480U (2023) https://doi.org/10.1117/12.2675900
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States
Abstract
Plasmonic metasurfaces, i.e., ultrathin arrays of engineered metallic meta-atoms, have attracted increasing attention due to their unprecedented capabilities of molding classical light. Despite significant progress, most existing metadevices to date are passive and lack real-time dynamic modulation post-fabrication. Therefore, it is highly desirable to realize tunable metasurfaces with functionalities actively controlled by applying external stimuli, which are promising for more intelligent and adaptive systems. In this talk, I will talk about a piezoelectric MEMS-empowered dynamic metasurface platform for active wavefront shaping by electrically varying the gap between the MEMS mirror and the designed optical metasurface layer. In particular, I will introduce how to achieve full-range birefringence control and tunable chirality.
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Fei Ding "Piezoelectric MEMS-empowered dynamic metasurfaces", Proc. SPIE PC12648, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXI, PC126480U (5 October 2023); https://doi.org/10.1117/12.2675900
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KEYWORDS
Birefringence
Intelligence systems
Microelectromechanical systems
Mirrors
Modulation
Nanophotonics
Optical design
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