Compact and low cost interference lithography based on external cavity diode laser and prism

Daiki Matsubayashi; Agnieszka Gwiazda; Komla Nomenyo; Hiroshi Kano; Gilles Lérondel

doi:10.1117/12.2680560

5 October 2023 Compact and low cost interference lithography based on external cavity diode laser and prism

Daiki Matsubayashi, Agnieszka Gwiazda, Komla Nomenyo, Hiroshi Kano, Gilles Lérondel

Proceedings Volume PC12652, UV and Higher Energy Photonics: From Materials to Applications 2023; PC1265206 (2023) https://doi.org/10.1117/12.2680560
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

We proposed a cost-effective and compact optical setup for laser Interference lithography. The system is based on the special designed wave-front splitting prisms with only one spatial filter for two and tree coplanar beams interference. This configuration allows to reduce the total size of the setup. Employing a low coherence laser diode source allows to reduce the price and the size of the setup as well. The coherence length of the source was improved by Littrow type external cavity configuration. The patterning on large area (1 cm2) with sub-micron resolution was successfully demonstrated.

Conference Presentation

Citation Download Citation

Daiki Matsubayashi, Agnieszka Gwiazda, Komla Nomenyo, Hiroshi Kano, and Gilles Lérondel "Compact and low cost interference lithography based on external cavity diode laser and prism", Proc. SPIE PC12652, UV and Higher Energy Photonics: From Materials to Applications 2023, PC1265206 (5 October 2023); https://doi.org/10.1117/12.2680560

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