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24 November 2023 Quantized nanolaminates of Ta2O5-SiO2 and amorphous silicon-SiO2 manufactured by magnetron sputter deposition
Silvia Schwyn Thoeny, Manuel Bärtschi, Marietta Batzer, Manuel Baselgia, Raphael Gmünder, Stephan Waldner
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Proceedings Volume PC12726, Laser-Induced Damage in Optical Materials 2023; PC127260N (2023) https://doi.org/10.1117/12.2682100
Event: SPIE Laser Damage, 2023, Dublin/Livermore, California, United States
Abstract
Quantization effects in nanolaminate structures of oxide materials were proposed and experimentally demonstrated only recently. In this paper we will investigate the material combinations of Ta2O5-SiO2 and amorphous silicon-SiO2 deposited by magnetron sputtering and show that the quantization effect is observed in both materials. We will describe the deposition process and demonstrate the tunability of the refractive index and the bandgap energy. Quantized nanolaminates (QNL) composed of Ta2O5-SiO2 in combination with SiO2 were used as high and low refractive materials in optical interference coatings forming an antireflection and a mirror coating, whereas QNL with aSi-SiO2 as the high index material were used in a log pass filter with edge at 720nm. All designs could be deposited successfully with close match to the design. The aSi-SiO2 based filter showed a blocking range throughout the visible spectrum whereas a comparable filter based on SiO2-TiO2 only blocked 500-700nm.
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Silvia Schwyn Thoeny, Manuel Bärtschi, Marietta Batzer, Manuel Baselgia, Raphael Gmünder, and Stephan Waldner "Quantized nanolaminates of Ta2O5-SiO2 and amorphous silicon-SiO2 manufactured by magnetron sputter deposition", Proc. SPIE PC12726, Laser-Induced Damage in Optical Materials 2023, PC127260N (24 November 2023); https://doi.org/10.1117/12.2682100
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KEYWORDS
Sputter deposition
Silica
Magnetrons
Manufacturing
Refractive index
Silicon
Tunable filters
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