Author Affiliations +
Patrick P. W. Lee,1 Frankie F. G. Tsai,1 Harry C. Y. Ku,1 Min-Da Cheng,1 Joey J. Y. Wang,1 Peter J. Y. Chang,1 M. J. Lii,1 Jacqueline Atanelov,2 Anh-Dai Dang,2 Samuel Kvasnica2
1Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
2IMS Nanofabrication GmbH (Austria)