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13 March 2024 Recent progress in the laser microprinting of semiconductors and metals
Paul Somers, Matthias Steurer, Steven Kraus, Florian Feist, Ben Breitung, Gabriel C. Marques, Bastian Weinert, Christian Dolle, Erich Müller, Jasmin Aghassi-Hagmann, Stefanie Dehnen, Yolita Eggeler, Claus Feldmann, Christopher Barner-Kowollik, Martin Wegener
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Proceedings Volume PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; PC128720C (2024) https://doi.org/10.1117/12.2692064
Event: SPIE LASE, 2024, San Francisco, California, United States
Abstract
Recently, we published our early results on laser microprinting of functional microelectronics (Nature Commun. 14, 1103 (2023)). Here, we report our progress beyond this work. First, we present a simplified photothermal print scheme – again without the need for post-processing. This scheme includes the purposeful choice of the printing substrate as well as new inks. Second, we present our early results on in-situ monitoring of the metal- and semiconductor-growth processes by time-resolving a weak co-focused reflected probe laser beam. Third, we discuss how the print parameters such as focus speed and laser power influence the morphology of the printed material.
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Paul Somers, Matthias Steurer, Steven Kraus, Florian Feist, Ben Breitung, Gabriel C. Marques, Bastian Weinert, Christian Dolle, Erich Müller, Jasmin Aghassi-Hagmann, Stefanie Dehnen, Yolita Eggeler, Claus Feldmann, Christopher Barner-Kowollik, and Martin Wegener "Recent progress in the laser microprinting of semiconductors and metals", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC128720C (13 March 2024); https://doi.org/10.1117/12.2692064
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KEYWORDS
Semiconductors
Metals
Printing
Semiconductor lasers
Laser beam diagnostics
Microelectronics
Reflection
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