Applying deep learning methods in flat panel display mask shop operation

Stefan Fu

doi:10.1117/12.3012447

26 September 2023 Applying deep learning methods in flat panel display mask shop operation

Stefan Fu

Proceedings Volume PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; PC129150I (2023) https://doi.org/10.1117/12.3012447
Event: Photomask Japan 2023, 2023, Online Only

Abstract

This conference presentation was prepared for Photomask Japan 2023.

Conference Presentation

Citation Download Citation

Stefan Fu "Applying deep learning methods in flat panel display mask shop operation", Proc. SPIE PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, PC129150I (26 September 2023); https://doi.org/10.1117/12.3012447

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