Integration of ferroelectric thin films on Si and SiN platforms via wet chemical deposition

Jeroen Beeckman; Enes Lievens; Kobe De Geest; Ewout Picavet; Klaartje De Buysser; Dries Van Thourhout

doi:10.1117/12.3017820

19 June 2024 Integration of ferroelectric thin films on Si and SiN platforms via wet chemical deposition

Jeroen Beeckman, Enes Lievens, Kobe De Geest, Ewout Picavet, Klaartje De Buysser, Dries Van Thourhout

Proceedings Volume PC13012, Integrated Photonics Platforms III; PC1301207 (2024) https://doi.org/10.1117/12.3017820
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Hybrid integration of ferroelectric thin films is a one possible route for obtaining high-speed electro-optic modulation on photonic integrated platforms. Excellent electro-optic modulators have been shown using the thin film lithium niobate technology which relies on bonding of transfer printing monocrystalline layers onto existing photonic circuits. The Pockels coefficients of lithium niobate are quite good, but lead zirconate (PZT) and barium titanate (BTO) exhibit coefficients that are several factors higher. PZT and BTO layers with high quality are grown using a cheap and up-scalable method of chemical solution deposition. We present electro-optic characterization of these thin films. Progress in the deposition procedure has led to thin films with an excellent effective Pockels coefficient. We demonstrate integrated electro-optic modulators using both PZT and BTO thin films, in combination with both Si and SiN waveguides, demonstrating the versatility and scalability of thin ferroelectric films grown using a wet chemical process.

Conference Presentation

Citation Download Citation

Jeroen Beeckman, Enes Lievens, Kobe De Geest, Ewout Picavet, Klaartje De Buysser, and Dries Van Thourhout "Integration of ferroelectric thin films on Si and SiN platforms via wet chemical deposition", Proc. SPIE PC13012, Integrated Photonics Platforms III, PC1301207 (19 June 2024); https://doi.org/10.1117/12.3017820

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