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Reflective Micro Electro Mechanical System (MEMS) display as a spatial light modulator with synchronized nano-second pulse effectively diffracts light into one of multiple diffraction orders with high efficiency. Beam and image steering in a time sequential manner by this principle is applied for optical systems such as lidar, near-to-eye display and high-framerate cameras. We overview diffractive MEMS based beam and image steering by using a concept Time-to-Angle Conversion.
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Yuzuru Takashima, Yexin Pei, Rajesh Shrestha, Lily A. McKenna, Yefu Zhang, Emil R. Varghese, Xianyue Deng, Gregory M. Nero, Jeff Chen, Jeff Chang, Ted L. T. Lee, Parker Liu, Tianyao Zhang, "Time to angle conversion by MEMS spatial light modulator for wide field of view AR projection engine and solid-state scanning lidar," Proc. SPIE PC13142, ODS 2024: Industrial Optical Devices and Systems, PC131420A (4 October 2024); https://doi.org/10.1117/12.3028860