Ductile molybdenum metal: DUMOMET

Christina Biebach; Christoph Adelhelm; Alexander Lorich; David Zacharias

doi:10.1117/12.3034931

13 November 2024 Ductile molybdenum metal: DUMOMET

Christina Biebach, Christoph Adelhelm, Alexander Lorich, David Zacharias

Author Affiliations +

Proceedings Volume PC13215, International Conference on Extreme Ultraviolet Lithography 2024; PC1321513 (2024) https://doi.org/10.1117/12.3034931
Event: SPIE Photomask Technology + EUV Lithography, 2024, Monterey, California, United States

Conference Poster

Abstract

Molybenum shows good corrosion resistance against liquid metals like tin. This makes it an ideal material for EUV sources. However, a disadvantage of conventional processed Molybdenum is a rather low ductility at room temperature, depending on deformation and annealing conditions. Through extensive studies of grain boundaries and the segregation behavior of foreign elements in Molybdenum, combined with a special thermo-mechanical treatment, Plansee was able to engineer a ductile Molybdenum called DUMOMET^®. Room temperature tensile tests reveal an increased elongation at room temperature for DUMOMET^® of over 30%, an ultimate tensile strength of approx. 540MPa and a yield strength of approx. 370MPa. Due to special thermo-mechanical processing the material shows isotropic behavior in all three dimensions. Furthermore, the fracture toughness increases significantly from a low single digit number up to 23MPa√m which qualifies the material also for pressure vessel applications. Bending tests show that the fracture mechanism changes from inter-crystalline for conventional treated Molybdenum to trans-crystalline fracture mode for DUMOMET^®.

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Christina Biebach, Christoph Adelhelm, Alexander Lorich, and David Zacharias "Ductile molybdenum metal: DUMOMET", Proc. SPIE PC13215, International Conference on Extreme Ultraviolet Lithography 2024, PC1321513 (13 November 2024); https://doi.org/10.1117/12.3034931

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