Coherence

Coherence

Book: Principles of Lithography, Fourth Edition

Author(s): Harry J. Levinson

Published: 2019

https://doi.org/10.1117/3.2525393.ap1

Abstract

Coherence refers to the degree that light waves are correlated. Coherence has been the subject of entire books on optics, or at least lengthy chapters. A few essential elements are summarized in this Appendix. There are two types of coherence— temporal coherence and spatial coherence, both of which are relevant to lithography.