1 October 2011 Manufacture of carbon microelectrodes by laser lithography for electrochemical detection
Silvino Altuna, Adrian Fernandez, Miguel Garcia, Maria Rodriguez, Jose Rodriguez
Author Affiliations +
Abstract
Carbon microelectrodes have been implemented as sensing phases in order to improve the efficiency of the electrochemical sensing in capillary electrophoresis microchips. Surface and embedded carbon microelectrodes were fabricated on glassy substrates using a laser lithography technique. Both types of microelectrodes were successfully verified and, in the case of embedded microelectrodes, are proving to be an excellent alternative to increase the sensitivity of biosensors based on capillary electrophoresis.
©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Silvino Altuna, Adrian Fernandez, Miguel Garcia, Maria Rodriguez, and Jose Rodriguez "Manufacture of carbon microelectrodes by laser lithography for electrochemical detection," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(4), 043013 (1 October 2011). https://doi.org/10.1117/1.3661993
Published: 1 October 2011
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KEYWORDS
Carbon

Photoresist materials

Manufacturing

Photomasks

Electrodes

Lithography

Glasses

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