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1 July 2011Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes
We have developed compact devices to control electrostatically driven resonant micromirrors with one and two axes. For stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. Our devices feature optical position sensing and driver electronics with closed loop control. In this contribution, we present in much detail the novel two-dimensional device and highlight specific aspects of this system.
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Andreas Tortschanoff, Albert Frank, Michael Wildenhain, Thilo Sandner, Andreas Kenda, "Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes," J. Micro/Nanolith. MEMS MOEMS 10(3) 033006 (1 July 2011) https://doi.org/10.1117/1.3609230