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1 October 2011 Lossless circuit layout image compression algorithm for maskless direct write lithography systems
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Abstract
The recent algorithm Corner is a transform-based technique to represent a circuit layout image for maskless direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1. it requires fewer symbols during the corner transform, 2. it has a simpler and faster decoding process, while 3. it requires a similar amount of memory for the decoding process.
Jeehong Yang and Serap A. Savari "Lossless circuit layout image compression algorithm for maskless direct write lithography systems," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(4), 043007 (1 October 2011). https://doi.org/10.1117/1.3644620
Published: 1 October 2011
JOURNAL ARTICLE
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CHORUS Article. This article was made freely available starting 30 September 2012

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