Special Section Guest Editorial: Emerging MOEMS Technology and Applications

M. Edward Motamedi; Joel Kubby; Patrick I. Oden; Wibool Piyawattanametha

doi:10.1117/1.JMM.13.1.011101

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21 March 2014 Special Section Guest Editorial: Emerging MOEMS Technology and Applications

M. Edward Motamedi, Joel Kubby, Patrick I. Oden, Wibool Piyawattanametha

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J. of Micro/Nanolithography, MEMS, and MOEMS, 13(1), 011101 (2014). https://doi.org/10.1117/1.JMM.13.1.011101

Abstract

This JM3 special section on emerging MOEMS comprises a collection of excellent papers emphasizing new technologies in MOEMS applications that have come to existence. The section includes outstanding new results in commercial research and development in photonics where micro-optics and MEMS are merged and innovative breakthrough devices come to light.

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M. Edward Motamedi, Joel Kubby, Patrick I. Oden, and Wibool Piyawattanametha "Special Section Guest Editorial: Emerging MOEMS Technology and Applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(1), 011101 (21 March 2014). https://doi.org/10.1117/1.JMM.13.1.011101

Published: 21 March 2014

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