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21 March 2014 Special Section Guest Editorial: Emerging MOEMS Technology and Applications
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Abstract
This JM3 special section on emerging MOEMS comprises a collection of excellent papers emphasizing new technologies in MOEMS applications that have come to existence. The section includes outstanding new results in commercial research and development in photonics where micro-optics and MEMS are merged and innovative breakthrough devices come to light.
M. Edward Motamedi, Joel Kubby, Patrick I. Oden, and Wibool Piyawattanametha "Special Section Guest Editorial: Emerging MOEMS Technology and Applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(1), 011101 (21 March 2014). https://doi.org/10.1117/1.JMM.13.1.011101
Published: 21 March 2014
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