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20 February 2014 Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera
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This paper reports on a gimbaled MEMS scanning mirror with quasistatic resonant actuation, specially developed for adaptive raster scanning in an innovative three-dimensional (3-D) time-of-flight (ToF) laser camera with real-time foveation. Large quasistatic deflections of ±10  deg are provided by vertical comb drives in the vertical direction in contrast to resonant horizontal scanning. This mirror is 2.6×3.6  mm and operates at 1600 Hz with an 80-deg optical scan range. For position feedback, piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effectively 5 mm, a synchronized driven MEMS scanner array—consisting of five hybrid assembled MEMS devices—is used in an innovative 3-D ToF laser scanner. This enables a distance measuring rate of 1 MVoxel/s with an uncertainty in distance measurement of 3 to 5 mm for a 7.5-m measuring range for a gray target. Flatness-based open loop control is used for driving control of quasistatic axis in order to compensate for the dynamics of the low damped MEMS system.
Thilo Sandner, Thomas Grasshoff, Markus Schwarzenberg, Richard Schroedter, and Harald Schenk "Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(1), 011114 (20 February 2014).
Published: 20 February 2014


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