Low-cost reciprocating electromagnetic-based micropump for high-flow rate applications

Abbas Hakim Sima; Alinaghi Salari; Mohammad Behshad Shafii

doi:10.1117/1.JMM.14.3.035003

3 September 2015 Low-cost reciprocating electromagnetic-based micropump for high-flow rate applications

Abbas Hakim Sima, Alinaghi Salari, Mohammad Behshad Shafii

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 3, 035003 (September 2015). https://doi.org/10.1117/1.JMM.14.3.035003

Abstract

A reciprocating single-chamber micropump is designed and experimentally tested. The actuation technique of the pump is based on Lorentz force acting on an array of low-weight microwires placed on a flexible membrane surface. A square-wave electric current (5.6 and 7.8 A) with a low-frequency range (5.6 to 7.6 Hz) is applied through the microwires in the presence of a perpendicular magnetic field (0.08 to 0.09 T). The resultant oscillating Lorentz force causes the membrane to oscillate with the same frequency, and pushes the fluid to flow toward the outlet using a high-efficiency ball-valve. The micropump has exhibited a maximum efficiency of 2.03% with a flow rate as high as 490 μl/s and back pressure up to 1.5 kPa. Having a high self-pumping frequency of F_sp=32.71/min compared to other micropumps, our proposed pump is suitable for a wide range of applications specifically for biofluid transport.

Citation Download Citation

Abbas Hakim Sima, Alinaghi Salari, and Mohammad Behshad Shafii "Low-cost reciprocating electromagnetic-based micropump for high-flow rate applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(3), 035003 (3 September 2015). https://doi.org/10.1117/1.JMM.14.3.035003

Published: 3 September 2015

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