MEMS mirror-control algorithm for optical switches

Naru Nemoto; Joji Yamaguchi

doi:10.1117/1.JMM.15.4.045003

29 November 2016 MEMS mirror-control algorithm for optical switches

Naru Nemoto, Joji Yamaguchi

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 4, 045003 (November 2016). https://doi.org/10.1117/1.JMM.15.4.045003

Abstract

We propose an optical-axis alignment technique with high accuracy and high speed using two microelectromechanical-systems mirrors as optical deflectors. The mirrors are vibrated by small perturbations with two different frequencies, and the angle errors of each mirror are separated accurately by applying discrete Fourier transformation on the waveform of the optical power. The cycle time of correction is 5 ms, and the optical power reaches the optimum level within 15 ms at 30-dB loss.

Citation Download Citation

Naru Nemoto and Joji Yamaguchi "MEMS mirror-control algorithm for optical switches," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(4), 045003 (29 November 2016). https://doi.org/10.1117/1.JMM.15.4.045003

Published: 29 November 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available