MEMS mirror-control algorithm for optical switches

Naru Nemoto; Joji Yamaguchi

doi:10.1117/1.JMM.15.4.045003

Translator Disclaimer

29 November 2016 MEMS mirror-control algorithm for optical switches

Naru Nemoto, Joji Yamaguchi

Author Affiliations +

J. of Micro/Nanolithography, MEMS, and MOEMS, 15(4), 045003 (2016). https://doi.org/10.1117/1.JMM.15.4.045003

Abstract

We propose an optical-axis alignment technique with high accuracy and high speed using two microelectromechanical-systems mirrors as optical deflectors. The mirrors are vibrated by small perturbations with two different frequencies, and the angle errors of each mirror are separated accurately by applying discrete Fourier transformation on the waveform of the optical power. The cycle time of correction is 5 ms, and the optical power reaches the optimum level within 15 ms at 30-dB loss.

Citation Download Citation

Naru Nemoto and Joji Yamaguchi "MEMS mirror-control algorithm for optical switches," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(4), 045003 (29 November 2016). https://doi.org/10.1117/1.JMM.15.4.045003

Published: 29 November 2016

ACCESS THE FULL ARTICLE