Translator Disclaimer
29 November 2016 MEMS mirror-control algorithm for optical switches
Author Affiliations +
Abstract
We propose an optical-axis alignment technique with high accuracy and high speed using two microelectromechanical-systems mirrors as optical deflectors. The mirrors are vibrated by small perturbations with two different frequencies, and the angle errors of each mirror are separated accurately by applying discrete Fourier transformation on the waveform of the optical power. The cycle time of correction is 5 ms, and the optical power reaches the optimum level within 15 ms at 30-dB loss.
Naru Nemoto and Joji Yamaguchi "MEMS mirror-control algorithm for optical switches," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(4), 045003 (29 November 2016). https://doi.org/10.1117/1.JMM.15.4.045003
Published: 29 November 2016
JOURNAL ARTICLE
7 PAGES


SHARE
Advertisement
Advertisement
Back to Top