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17 October 2019 Method to fabricate taper waveguide using fixed-beam moving stage electron-beam lithography
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Abstract

A method of tapering waveguides using fixed-electronic-beam-moving-stage (FBMS) paths is presented. The tapering is achieved by joining two FBMS paths to a common point. Compared to conventional area and FBMS tapering methods, the proposed method offers smooth and alignment-error-free tapering between waveguides of different widths. We experimentally demonstrate a fully functional FBMS patterned photonic circuit with a power splitter, wire-to-slot coupler, slot waveguide, and a slotted ring resonator. The device response with an insertion loss of −1.35  dB is measured around 1550-nm wavelength.

Viphretuo Mere and Shankar Kumar Selvaraja "Method to fabricate taper waveguide using fixed-beam moving stage electron-beam lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(4), 043503 (17 October 2019). https://doi.org/10.1117/1.JMM.18.4.043503
Received: 3 May 2019; Accepted: 25 September 2019; Published: 17 October 2019
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