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1 April 2008 Silicon-Based MOEMS and Their Applications
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Harald Schenk and Wibool Piyawattanametha "Silicon-Based MOEMS and Their Applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(2), 020901 (1 April 2008). https://doi.org/10.1117/1.2913329
Published: 1 April 2008
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