Direct etching of SiO2 and Al2O3 by 900-keV gold ions

Gary A. Glass; Johnny F. Dias; Alexander D. Dymnikov; Louis M. Houston; Bibhudutta Rout

doi:10.1117/1.3082185

1 January 2009 Direct etching of SiO₂ and Al₂O₃ by 900-keV gold ions

Gary A. Glass, Johnny F. Dias, Alexander D. Dymnikov, Louis M. Houston, Bibhudutta Rout

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 1, 013013 (January 2009). https://doi.org/10.1117/1.3082185

Abstract

We report the direct etching of Al₂O₃ and SiO₂ using 900-keV Au⁺ ions. 2000-mesh Cu grids were employed as masks using two different configurations: (1) the Cu mesh was placed on top of each insulator separately and independent irradiations were performed, and (2) the Al₂O₃ and SiO₂ substrates were positioned in an edge-to-edge configuration with a single Cu grid providing a common mask to both insulators. Scanning electron microscopy (SEM) analysis revealed quite different patterns resulting from the two irradiation configurations. While the irradiation using individual masks resulted in mirror-image patterns of the Cu mask in the substrates, the use of a common mask led to single line structures approximately normal to the edges of the substrates. The role of charge buildup and sputtering in relation to relative dielectric properties of the substrates and close proximity of the samples during irradiation is discussed.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Gary A. Glass, Johnny F. Dias, Alexander D. Dymnikov, Louis M. Houston, and Bibhudutta Rout "Direct etching of SiO₂ and Al₂O₃ by 900-keV gold ions," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(1), 013013 (1 January 2009). https://doi.org/10.1117/1.3082185

Published: 1 January 2009

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