Design and fabrication of a micromachined bilayer cantilever probe card

Xiangmeng Jing; Di Chen; Xiang Chen; Jianmin Miao; Jingquan Liu; Jun Zhu

doi:10.1117/1.3517100

1 October 2010 Design and fabrication of a micromachined bilayer cantilever probe card

Xiangmeng Jing, Di Chen, Xiang Chen, Jianmin Miao, Jingquan Liu, Jun Zhu

Author Affiliations +

Funded by: National Natural Science Foundation of China (NSFC), Chinese National Natural Science Foundation, National Key Laboratory of Micro/Nano Fabrication Technology

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 4, 043005 (October 2010). https://doi.org/10.1117/1.3517100

Abstract

We present a bilayer cantilever microelectromechanical systems probe card configuration aiming to achieve an optimization of the mechanical and electrical properties of the probes. This bilayer cantilever structure is analyzed by an analytical method, and then further validated by finite element analysis. A prototype probe card structure is designed for the parallel I/O pads layout with a pitch of 100 µm, and developed via combining Si micromachining and ultraviolet Lithographie, Galvanoformung, Abformung (lithography, electroplating, and molding) (UV-LIGA) technique. The measured spring constant of the cantilever is 0.6362 Nm^-1, close to the theoretical prediction. The resistance from the probe tip to the end of the Cu conductive line is as low as 0.035 , indicating a very small electrical loss on the probe structure. In the radio frequency (rf) range of 0 to 40 MHz, the characteristic impedance is higher than 20 k, while the capacitance between two adjacent probes is around 0.13 pF. These measurement data indicate that the designed cantilever probe card structure has a good rf isolation property that makes it suitable for the testing of high-speed signal ICs.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Xiangmeng Jing, Di Chen, Xiang Chen, Jianmin Miao, Jingquan Liu, and Jun Zhu "Design and fabrication of a micromachined bilayer cantilever probe card," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(4), 043005 (1 October 2010). https://doi.org/10.1117/1.3517100

Published: 1 October 2010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE