Programmed line width roughness metrology by multitechniques approach

Jérôme Reche; Maxime Besacier; Patrice Gergaud; Yoann Blancquaert; Guillaume Freychet; Thibault Labbaye

doi:10.1117/1.JMM.17.4.041005

31 July 2018 Programmed line width roughness metrology by multitechniques approach

Jérôme Reche, Maxime Besacier, Patrice Gergaud, Yoann Blancquaert, Guillaume Freychet, Thibault Labbaye

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 17, Issue 4, 041005 (July 2018). https://doi.org/10.1117/1.JMM.17.4.041005

Abstract

At modern manufacturing geometries, roughness control presents a huge challenge for the lithography step. For advanced nodes, this morphological aspect reaches the same order of magnitude as the critical dimension (CD). Hence, the control of roughness needs an adapted metrology. Specific samples with designed roughness have been manufactured using e-beam lithography. These samples have been characterized with three different methodologies: CD-scanning electron microscopy, optical critical dimension, and small angle x-ray scattering. The main goal is to compare the capability of each of these techniques in terms of reliability, type of information obtained, time to obtain the measurements, and level of maturity for the industry. The next step will be to develop a hybrid metrology approach for roughness determination with these techniques.

Citation Download Citation

Jérôme Reche, Maxime Besacier, Patrice Gergaud, Yoann Blancquaert, Guillaume Freychet, and Thibault Labbaye "Programmed line width roughness metrology by multitechniques approach," Journal of Micro/Nanolithography, MEMS, and MOEMS 17(4), 041005 (31 July 2018). https://doi.org/10.1117/1.JMM.17.4.041005

Received: 19 March 2018; Accepted: 10 July 2018; Published: 31 July 2018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available