Blazed silicon gratings fabricated by deflecting crystal orientation (111) silicon wafer

Hui Ju; Ping Zhang; Jingqiu Liang; Shurong Wang; YiHui Wu

doi:10.1117/1.1857533

1 January 2005 Blazed silicon gratings fabricated by deflecting crystal orientation (111) silicon wafer

Hui Ju, Ping Zhang, Jingqiu Liang, Shurong Wang, YiHui Wu

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 1, 019701 (January 2005). https://doi.org/10.1117/1.1857533

Abstract

Bulk silicon wet etching can be used to fabricate silicon gratings. Wet etching depends on the anisotropic property of monocrystalline silicon. Blazed gratings for different spectral ranges can be fabricated by this method, and facets of grooves are formed by crystallographic planes of the monocrystalline silicon wafer. We develop a method to fabricate blazed gratings using deflecting crystal orientation (111) silicon wafers. The topographies of the samples are measured by SEM and atomic force microscopy (AFM), and the results indicate that the samples have grooves of good uniformity and facets of excellent optical quality.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Hui Ju, Ping Zhang, Jingqiu Liang, Shurong Wang, and YiHui Wu "Blazed silicon gratings fabricated by deflecting crystal orientation (111) silicon wafer," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(1), 019701 (1 January 2005). https://doi.org/10.1117/1.1857533

Published: 1 January 2005

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available