Analysis of a diffractive microlens using the finite-difference time-domain method

Yuling Liu; Hua Liu

doi:10.1117/1.3469817

1 July 2010 Analysis of a diffractive microlens using the finite-difference time-domain method

Yuling Liu, Hua Liu

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 3, 033004 (July 2010). https://doi.org/10.1117/1.3469817

Abstract

The finite-difference time-domain (FDTD) method is used as rigorous electromagnetic analysis model to calculate the field for a diffractive microlens (DML). The FDTD is used for the entire solution rather than using a near- to far-field propagation method to obtain the far-field energy distribution; thus, all the results are vector based. We derived a formula to calculate the magnitude of electric field, which is time dependent and can be used to graphically show the light wave propagation and focusing process through a DML. Both the comparison and the integral methods are presented to obtain wave amplitude in full solution space, and the distribution of light energy behind a DML is illustrated based on the wave amplitude. The formula of diffractive efficiency of the DML is derived from a time-averaged Ponyting vector, which can indicate the propagation direction of light energy. Application of these formulations in the analysis of a DML example demonstrates the high accuracy and efficiency of our method.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yuling Liu and Hua Liu "Analysis of a diffractive microlens using the finite-difference time-domain method," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(3), 033004 (1 July 2010). https://doi.org/10.1117/1.3469817

Published: 1 July 2010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE