Piezoelectric Inchworm Operation in a Vacuum

A. W. Hartman

doi:10.1117/12.7972297

1 December 1978 Piezoelectric Inchworm Operation in a Vacuum

A. W. Hartman

Author Affiliations +

Optical Engineering, Vol. 17, Issue 6, 176645 (December 1978). https://doi.org/10.1117/12.7972297

Abstract

An "inchworm"-type piezoelectric displacement device has been tested for operation in a vacuum. Comparative data are given for its operation at two pressures (1 atmosphere and 10-6 to 1O-7 torr), three loads (0, 8, 15 N), and four speeds in the range 0.5 to 50 micrometers per second. The results are such that the device is now being applied successfully to drive an X-Y stage in a scanning electron microscope (SEM).

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A. W. Hartman "Piezoelectric Inchworm Operation in a Vacuum," Optical Engineering 17(6), 176645 (1 December 1978). https://doi.org/10.1117/12.7972297

Published: 1 December 1978

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