Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing

Eberhard Adolf Spiller

doi:10.1117/12.55642

1 June 1990 Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing

Eberhard Adolf Spiller

Author Affiliations +

Optical Engineering, Vol. 29, Issue 6, (June 1990). https://doi.org/10.1117/12.55642

Abstract

The performance of multilayer x-ray mirrors is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at ? = 63.5 and 114 Å, and the reflectivity is increased by a factor of 2 in both cases. Accumulation of roughness during deposition is eliminated. An estimate of the presently achievable reflectivity for normal incidence mirrors in the ? = 44 to 120 Å wavelength range is given.

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Eberhard Adolf Spiller "Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing," Optical Engineering 29(6), (1 June 1990). https://doi.org/10.1117/12.55642

Published: 1 June 1990

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