Micro-opto-electro-mechanical systems

M. Edward Motamedi

doi:10.1117/12.181572

1 November 1994 Micro-opto-electro-mechanical systems

M. Edward Motamedi

Author Affiliations +

Optical Engineering, Vol. 33, Issue 11, (November 1994). https://doi.org/10.1117/12.181572

Abstract

Micro-optical devices such as diffractive and refractive microlenses fabricated using integrated circuit technology have been highlighted during the past five years. This scientific breakthrough has created a revolution in optical technology. Miniaturizing devices using microoptics promise to revolutionize many electrooptical systems-from video cameras, video phones, and compact disk data storage to robotic vision, optical scanners, and high-definition projection displays. The supporting technologies for these micro-optical systems, such as binary optics and plastic micro-replication, are built on existing or adapted integrated circuit technologies that have been developed over the past five years. In parallel with this optical technology revolution, researchers have also developed another frontier technology called micro-electro-mechanical (MEM). MEM technology has found applications in automotive, machine tools, airbag actuators, and many generic microsensors. Merging microoptics, microelectronics, and micromechanics creates a new and broader class of micro-opto-electro-mechanical (MOEM) devices, which may attract additional industrial demonstrations of commercial devices such as torsional mirrors, laser scanners, optical shutters, and dynamic micromirror displays. Both constituent technologies of MOEM devices have the potential of batch processing and embossed replication, which, again, makes them highly attractive for low-cost commercial applications. Other more complex microsystems that use MOEM devices such as microspectrometers, microinterferometers, and miniature on-machine-inspection subsystems are being investigated. This new technology enables high-performance devices for microsensor systems that are lighter, easier to produce, more efficient, and less expensive than conventional components.

Citation Download Citation

M. Edward Motamedi "Micro-opto-electro-mechanical systems," Optical Engineering 33(11), (1 November 1994). https://doi.org/10.1117/12.181572

Published: 1 November 1994

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available