Preshaping photoresist for refractive microlens fabrication

Theresa Rubico Jay; Margaret B. Stern

doi:10.1117/12.179887

1 November 1994 Preshaping photoresist for refractive microlens fabrication

Theresa Rubico Jay, Margaret B. Stern

Author Affiliations +

Optical Engineering, Vol. 33, Issue 11, (November 1994). https://doi.org/10.1117/12.179887

Abstract

Refractive microlenses are fabricated by the preshaped photoresist refractive optics by melting (P²ROM) process. A polar coordinate HeCd laser beam lithography system (laser writer) is used to directly expose a continuous spheroidal profile into photoresist to fabricate 200-μm-diam microlenses with speeds between f/1.5 and f/5. Interferometric surlace measurements, used to determine the optical quality of the preshaped microlenses, indicate reduced spherical aberration in slow lenses fabricated by the P²ROM method.

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Theresa Rubico Jay and Margaret B. Stern "Preshaping photoresist for refractive microlens fabrication," Optical Engineering 33(11), (1 November 1994). https://doi.org/10.1117/12.179887

Published: 1 November 1994

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