Simple technique for out-of-focus feature alignment

Jose M. Sasian; Douglas A. Baillie

doi:10.1117/12.194047

1 February 1995 Simple technique for out-of-focus feature alignment

Jose M. Sasian, Douglas A. Baillie

Author Affiliations +

Optical Engineering, Vol. 34, Issue 2, (February 1995). https://doi.org/10.1117/12.194047

Abstract

A simple technique for in-line alignment of features that are axially separated is discussed. The precision of the technique is 2.5 μm or better.

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Jose M. Sasian and Douglas A. Baillie "Simple technique for out-of-focus feature alignment," Optical Engineering 34(2), (1 February 1995). https://doi.org/10.1117/12.194047

Published: 1 February 1995

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